Aluminum Nitride from SEMIXICON

Nanoplate resonator thermal IR detector has ultrashort time constant and high resolution

https://www.laserfocusworld.com/detectors-imaging/article/14074175/nanoplate-resonator-thermal-ir-detector-has-ultrashort-time-constant-and-high-resolution

An aluminum nitride (AlN) piezoelectric nanoplate suspended by two anchor beams is driven by two interdigitated electrodes (IDEs) so that it resonates; IR radiation received by the device changes the resonance frequency, providing a measurement of the IR flux received by the nanoplate.




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