Transparent Vacuum Chuck Table for Semiconductor Wafer
Transparent Vacuum Chuck Table for Semiconductor Wafer
Transparent Vacuum Chuck Table for Semiconductor Wafer
This patent pending and customer awarded transparent vacuum chuck table for semiconductor wafer processing allows full optical access to the wafer,this is opening a convenient door to some process which traditional porous chuck hold back.
Various kind of light sources can be also integrated in the design.
This patent pending and customer awarded transparent vacuum chuck table for semiconductor wafer processing allows full optical access to the wafer,this is opening a convenient door to some process which traditional porous chuck hold back.
Various kind of light sources can be also integrated in the design.
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